FILM THICKNESS MEASUREMENT DEVICE AND FILM THICKNESS MEASUREMENT METHOD

摘要

Provided are a film thickness measurement device and a film thickness measurement method with which it is possible to efficiently and accurately measure the film thickness of a thermal barrier coating which is carried out on an object to be measured. A film thickness measurement device (1) comprises: an ECT sensor (4) which measures film thickness of a thermal barrier coating which is formed upon a turbine blade (11); a storage means (9) for storing a measurement site upon the turbine blade (11) which is a site whereat the film thickness of the thermal barrier coating is measured; a laser displacement sensor (5) which measures the shape of the turbine blade (11); a measurement location computation means (8) for computing an actual measurement site which is suited to actual film thickness measurement by the ECT sensor (4) based on the shape of the turbine blade (11) which is measured by the laser displacement sensor (5) and the measurement site upon the turbine blade (11) which is stored in the storage means (9); and an arm drive means (6) for driving the ECT sensor (4) and adjusting the measurement location of the ECT sensor (4) based on the actual measurement site which is computed by the measurement location computation means (8).