发明名称 |
Method and apparatus for surface processing of a substrate using an energetic particle beam |
摘要 |
Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.
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申请公布号 |
GB2465528(B) |
申请公布日期 |
2013.02.27 |
申请号 |
GB20100005502 |
申请日期 |
2008.09.18 |
申请人 |
VEECO INSTRUMENTS INC |
发明人 |
BORIS DRUZ;ROGER P FREMGEN;ALAN V HAYES;VIKTOR KANAROV;ROBERT KRAUSE;IRA REISS;PIERO SFERLAZZO |
分类号 |
H01J37/317;C23C14/34;C23C14/50;H01J37/08;H01J37/20;H01J37/305 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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