| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a treated substrate from becoming sagged when both ends of the treated substrate are chucked by a transfer device for surface treatment and the treated substrate is taken into and out of a treatment part. <P>SOLUTION: Both ends in the first direction of a treated substrate 9 are chucked by a pair of chucks 30 and 30 provided apart in the first direction of a frame 22 of a substrate transfer device 3. Under such a chucked state, at least one of chucks 30 is biased on the opposite side of the other chuck by a tension granting means 27. Then the frame 22 is taken into and out of a treatment part 1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
