SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME

摘要

PURPOSE: A substrate processing apparatus and a method for transferring a substrate of the same are provided to reduce idle time of a facility by securing an accumulation space for a receiving container without increase of a footprint. CONSTITUTION: A substrate processing apparatus(700) comprises a process module(100), a main load stock(200), a buffer load stock(300), and at least on conveying unit(400). The process module processes the substrate. The main load stock loads at least one containing box. The main load stock transfers the substrate between the containing box and the loaded process module. The buffer load stock is lead-in and lead-from the process module. The conveying unit transfers the containing box between the main load stock and the buffer load stock.