发明名称 |
MICROELECTROMECHANICAL SYSTEM WITH BALANCED CENTER OF MASS |
摘要 |
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. A released structure may include a member with a recess formed into an end face of its free end. A released structure may include a plurality of members, with the longitudinal lengths of the members being of differing lengths. Mass of a member disposed below a plane of a flexure may be balanced by mass of a second substrate affixed to the member. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member. |
申请公布号 |
WO2012155078(A3) |
申请公布日期 |
2013.02.14 |
申请号 |
WO2012US37593 |
申请日期 |
2012.05.11 |
申请人 |
CALIENT NETWORKS, INC.;LEE, CHRIS SEUNG, BOK |
发明人 |
LEE, CHRIS SEUNG, BOK |
分类号 |
G02B26/08;H01H59/00;H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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