发明名称 |
WET BENCH APPARATUS AND METHOD |
摘要 |
<p>A wet bench system comprising a plurality of sequentially aligned containers. A first rail positioned generally horizontally adjacent a first side of the container and a first arm having a first end moveable on the first rail. A second rail positioned generally horizontally and adjacent a second side of the container and having a second arm having a first end moveable on the second rail. The arms being capable of moving articles to be treated by chemicals in containers by movement in a back and forth leap frog fashion.</p> |
申请公布号 |
EP2553233(A1) |
申请公布日期 |
2013.02.06 |
申请号 |
EP20110763446 |
申请日期 |
2011.03.31 |
申请人 |
ATS AUTOMATION TOOLING SYSTEMS INC. |
发明人 |
PAULMAN, JASON;SMITH, BRUCE;SOHN, RAYMOND |
分类号 |
F02B5/02;B08B7/02;H01L21/67;H01L21/677 |
主分类号 |
F02B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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