发明名称 WET BENCH APPARATUS AND METHOD
摘要 <p>A wet bench system comprising a plurality of sequentially aligned containers. A first rail positioned generally horizontally adjacent a first side of the container and a first arm having a first end moveable on the first rail. A second rail positioned generally horizontally and adjacent a second side of the container and having a second arm having a first end moveable on the second rail. The arms being capable of moving articles to be treated by chemicals in containers by movement in a back and forth leap frog fashion.</p>
申请公布号 EP2553233(A1) 申请公布日期 2013.02.06
申请号 EP20110763446 申请日期 2011.03.31
申请人 ATS AUTOMATION TOOLING SYSTEMS INC. 发明人 PAULMAN, JASON;SMITH, BRUCE;SOHN, RAYMOND
分类号 F02B5/02;B08B7/02;H01L21/67;H01L21/677 主分类号 F02B5/02
代理机构 代理人
主权项
地址