| 摘要 |
<P>PROBLEM TO BE SOLVED: To determine whether or not there is a leakage point in a workpiece in a short time and with high accuracy. <P>SOLUTION: Inspection gas is introduced to a hollow chamber 24 after gas is exhausted from the hollow chamber 24 of a case member 18 (workpiece). Gas in a monitor space 69 is agitated preferably under operation of a first fan 94 and a second fan 110 and then sent to a circulating piping 116. When the gas reaches a detector 122, a display value of the detector 122 represents a value according to concentration (amount) of leakage gas. If there is a leakage point in the case member 18, the inspection gas is leaked to a chamber 16 and mixed with the gas in the monitor space 69. The mixed gas is partially sent to the detector 122 through the circulating piping 116 and a sampling line 121. Meanwhile, the rest of the mixed gas is returned to the monitor space 69 through the circulating piping 116. <P>COPYRIGHT: (C)2013,JPO&INPIT |
