| 摘要 |
A treatment gas is prevented from leaking from a surface treatment nozzle device. On a main surface (11f) of a board-like supply groove forming member (11) of a nozzle device (3), a treatment gas supply groove (40) is formed, the main surface (11f) is covered with a covering member (12), and a treatment gas supply means (4) is connected to the treatment gas supply groove (40). An opening groove section (42) is opened on a leading end surface which intersects with the main surface (11f) of the supply groove forming member (11). Furthermore, an outer groove (80) is formed on a part outside the treatment gas supply groove (40) on the main surface (11f) or on the covering surface (12r) of the covering member (12), and the outer groove (80) is connected to a gas sucking means (5). |
