发明名称 Zinc oxide film forming method and apparatus
摘要 In the zinc oxide film forming apparatus (1), the deposit containing zinc oxide is formed on the conductive layer of the resin substrate (9) by electrodeposition in the deposition part (2), and the resin substrate (9) is carried to the applying part (4). Subsequently, the film forming material which is in liquid or paste form and contains particles of zinc oxide and solvent is applied onto the conductive layer, and then the solvent is removed from the film forming material on the conductive layer by volatilization. It is therefore possible to easily and efficiently form the porous zinc oxide film which has superior adhesion to the conductive layer of the resin substrate (9).
申请公布号 US8361831(B2) 申请公布日期 2013.01.29
申请号 US20090636358 申请日期 2009.12.11
申请人 DAINIPPON SCREEN MFG. CO., LTD.;YANE TAKESHI 发明人 YANE TAKESHI
分类号 H01L27/142;H01L21/288 主分类号 H01L27/142
代理机构 代理人
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