| 摘要 |
PURPOSE: A charged particle beam drawing device and a product manufacturing method are provided to easily remove a height difference of knife edges by measuring the height of knife edges using two or more beams with different radiation positions in an X direction of a substrate. CONSTITUTION: A charged particle optical system emits charged particle beams to a substrate. A stage(103) moves the substrate in an optical axis direction of the charged particle optical system and a vertical direction to an optical axis. An interference system(301) measures the location of a stage. A measurement device(201) measures the property of the charged particle beam. A controller(102) corrects the measurement result obtained by the interference system using correction information. |
