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发明名称
摘要
申请公布号	JP5124121(B2)	申请公布日期	2013.01.23
申请号	JP20060271071	申请日期	2006.10.02
申请人		发明人
分类号	C03C15/00;B81C1/00;H01L21/3065	主分类号	C03C15/00
代理机构		代理人
主权项
地址

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