发明名称 |
SOLID-STATE IMAGE PICKUP DEVICE, MANUFACTURING METHOD OF THE SAME AND ELECTRONIC APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a back side illumination solid-state image pickup device in which a high concentration impurity region is formed in a semiconductor substrate on a rear face side. <P>SOLUTION: A solid-state image pickup device comprises: a semiconductor substrate 17 in which a rear face side serves as a light incident surface and a surface side serves as a circuit formation surface; a connection part 23 serving as a connection part connected to a contact plug 31 transferring a signal charge generated on the semiconductor substrate on the rear face side to the inside the semiconductor substrate and having an impurity concentration distribution peak in vicinity of an interface of the semiconductor substrate on the rear face side; and one or more photoelectric conversion part formed in the semiconductor substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013012556(A) |
申请公布日期 |
2013.01.17 |
申请号 |
JP20110143581 |
申请日期 |
2011.06.28 |
申请人 |
SONY CORP |
发明人 |
MIYANAMI YUUKI |
分类号 |
H01L27/146;H04N5/369;H04N5/374 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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