发明名称 METHOD FOR FIXING SILICON CARBIDE SEED CRYSTAL AND METHOD FOR PRODUCING SINGLE CRYSTAL SILICON CARBIDE
摘要 The object of the present invention is to provide a method for fixing a silicon carbide seed crystal and a method for producing a silicon carbide single crystal which can produce a silicon carbide single crystal having high quality and no penetration defects, and the present invention provides a method for fixing a silicon carbide seed crystal on a pedestal including: a step of mirror polishing a surface of a pedestal on which a silicon carbide seed crystal is to be fixed; a step of irradiating atoms or ions to at least one of a seed crystal-side surface of the pedestal on which the silicon carbide seed crystal is to be fixed and a pedestal side-surface of the silicon carbide seed crystal which is to be fixed on the pedestal, in a vacuum; and a step of directly connecting the seed crystal side-surface of the pedestal and the pedestal side-surface of the silicon carbide seed crystal by bringing them into close contact and applying pressure to them in a vacuum.
申请公布号 US2013000547(A1) 申请公布日期 2013.01.03
申请号 US201113582592 申请日期 2011.03.02
申请人 SHOWA DENKO K.K.;KOGOI HISAO 发明人 KOGOI HISAO
分类号 C30B23/02 主分类号 C30B23/02
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