发明名称 METHODS OF MANUFACTURING SUSCEPTOR AND SUSCEPTOR MANUFACTURED BY THE METHODS
摘要 PURPOSE: A method for manufacturing a susceptor and the susceptor manufactured by the method are provided to implement uniform temperature by densely arranging a heat resistant line for a center molding product. CONSTITUTION: A center molding product(110) comprises a heat resistant line(112), an upper insulator(114), and a lower insulation material(111) and a heater core. The upper insulator and the lower insulation material electrically isolate the heat resistant line. The heater core is made of a center insulating material(113). The center insulator is filled between the upper insulator and the lower insulator. The susceptor body(120) is molded by a casting process.
申请公布号 KR101217504(B1) 申请公布日期 2013.01.02
申请号 KR20120087553 申请日期 2012.08.10
申请人 POTON 发明人 CHO, JUNG GEUN
分类号 H01L21/683;H05H1/34 主分类号 H01L21/683
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