| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a laminate, preventing a coating liquid containing a silicon compound, from sticking to a liquid contact part with which the coating liquid comes in contact, by a reaction with a trace of moisture, and maintaining this sticking preventive effect to attain coating of high accuracy and high stability. <P>SOLUTION: The method for manufacturing the laminate by applying the coating liquid containing the silicon compound, to a base material to form a silicon-containing coat on the base material, uses a coating apparatus having a member in which at least a part of the liquid contact part with which the coating liquid comes in contact is coated with a diamond-like carbon (DLC) film. <P>COPYRIGHT: (C)2013,JPO&INPIT |
