METHOD OF MANUFACTURING POLYCRYSTALLINE SILICON FRAGMENT, AND APPARATUS FOR CRUSHING POLYCRYSTALLINE SILICON

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing polycrystalline silicon fragments with which a maximum target dimension can be managed by crushing a polycrystalline silicon into the mass of a desired size during crushing, and the generation of fine powder can be suppressed, and a crushing apparatus suitable for crushing a polycrystalline silicon.

SOLUTION: A crushing apparatus 1 comprises a primary crushing means 10 for crushing a mass-shaped polycrystalline silicon, and a secondary crushing means 20 for crushing polycrystalline silicon fragments of larger sizes among polycrystalline silicon fragments resulting from crushing by the primary crushing means. A distal end face 55 of a crushing tooth 5 provided in each of rolls 3 of the primary crushing means 10 is formed spherical, and a side face 56 is formed conical. A distal end face 55 of a crushing tooth 5 provided in each of rolls 3 of the secondary crushing means 20 is formed spherical and a side face 56 is formed columnar.

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