ELECTROMAGNETIC WAVE MEASURING DEVICE, MEASURING METHOD, PROGRAM AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To test a sample having a laminar structure through a nondestructive test.

SOLUTION: An electromagnetic wave measuring device comprises: electromagnetic wave output apparatus 2 which outputs electromagnetic waves with frequencies from equal to or higher than 0.01 THz to equal to or lower than 100 THz toward a measurement object 1 having two or more layers 1a and 1b; electromagnetic wave detection apparatus 4 which detects reflected electromagnetic waves respectively reflected from the two or more layers 1a and 1b; and a layer analysis device 10 which measures the measurement object 1 on the basis of either or both of extreme values I1and I2of respective electromagnetic fields of the reflected electromagnetic waves and a time difference Δt1in timings t0and t1when the respective electromagnetic fields have the extreme values of the reflected electromagnetic waves.

COPYRIGHT: (C)2013,JPO&INPIT