| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a motor for vacuum and a robot for vacuum that do not discharge impurity gas to a space connected to a vacuum exhaust device. <P>SOLUTION: There is provided a motor 10a for vacuum which includes a cylinder member 11, a rotary shaft 12, a magnet 14, a coil 15, a rotary disk 21a which has codes for generating signals arranged on its surface along a circumference having its center on the center axis of the rotary shaft 12, and a sensor 22a capable of detecting signals, and evacuates the space where the rotary disk 21a is arranged while the space is connected to a vacuum exhaust device 42. The motor for vacuum includes a sensor chamber 24a in which the sensor 22a is arranged and a transmission window 23a which transmits signals, and the transmission window 23a is provided so as to close an opening of the sensor chamber 24a, so that the internal space of the sensor chamber 24a is separated from the space where the rotary disk 21a is arranged and impurity gas discharged from the sensor 22a is not discharged to the space connected to the vacuum exhaust device 42. <P>COPYRIGHT: (C)2013,JPO&INPIT |
