| 摘要 |
PURPOSE: An inline type heating treatment apparatus is provided to improve the reliability of a substrate heat treatment by uniformly maintaining a temperature of a heating furnace. CONSTITUTION: A heating furnace(110) has a temperature raising space(113) in an inner bottom side thereof to transfer a substrate and raise a temperature. A cooling space(115) is located in the inner top side of the heating furnace to transfer the substrate and drop the temperature. A first support unit transfers the substrate to the temperature raising space and supports the substrate transferred to the cooling space in an outlet side after the substrate is thermally treated. A transfer unit transfers the substrate from the temperature raising space of one side of the heating furnace to the temperature raising space of the other side of the heating furnace and transfers the substrate from the cooling space of the other side of the heating furnace to the cooling space of one side of the heating furnace.
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