发明名称 DIELECTRIC SPACER FOR DISPLAY DEVICES
摘要 This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.
申请公布号 US2012242638(A1) 申请公布日期 2012.09.27
申请号 US201113071394 申请日期 2011.03.24
申请人 ZHONG FAN;TAO YI;QUALCOMM MEMS TECHNOLOGIES, INC. 发明人 ZHONG FAN;TAO YI
分类号 G06F3/038;G02B26/00;H05K3/30 主分类号 G06F3/038
代理机构 代理人
主权项
地址