发明名称 Bonded wafer substrate utilizing roughened surfaces for use in MEMS structures
摘要 A method of manufacturing a semiconductor device includes providing first and second semiconductor substrates, each having first and second main surfaces opposite to one another. A roughened surface is formed on at least one of the first main surface of the first semiconductor substrate and the second main surface of the second semiconductor substrate. A dielectric layer is formed on the first main surface of the semiconductor substrate and the second semiconductor substrate is disposed on the dielectric layer opposite to the first semiconductor substrate. The second main surface of the second semiconductor substrate contacts the dielectric layer.
申请公布号 US8253243(B2) 申请公布日期 2012.08.28
申请号 US201113179175 申请日期 2011.07.08
申请人 WILSON ROBIN;ICEMOS TECHNOLOGY LTD. 发明人 WILSON ROBIN
分类号 H01L23/34;H01L21/00 主分类号 H01L23/34
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