VAPOR DEPOSITION APPARATUS FOR ORGANIC VAPOR DEPOSITION MATERIAL AND PROCESS FOR PRODUCING ORGANIC THIN FILM,申请号EP20070743158-传众专利搜索

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发明名称	VAPOR DEPOSITION APPARATUS FOR ORGANIC VAPOR DEPOSITION MATERIAL AND PROCESS FOR PRODUCING ORGANIC THIN FILM
摘要
申请公布号	EP2025774(A4)	申请公布日期	2012.07.25
申请号	EP20070743158	申请日期	2007.05.11
申请人	ULVAC, INC.	发明人	NEGISHI, TOSHIO
分类号	C23C14/24;H01L51/50;H05B33/10	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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