| 发明名称 |
Micromechanical component and method for the manufacture thereof |
| 摘要 |
A method for manufacturing a micromechanical component and the micromechanical component produced thereby. This component is preferably a diaphragm or a diaphragm layer which is independently produced for the purpose of subsequent assembly with other components. |
| 申请公布号 |
US8217476(B2) |
申请公布日期 |
2012.07.10 |
| 申请号 |
US20100817937 |
申请日期 |
2010.06.17 |
| 申请人 |
KRAFT KARL-HEINZ;ARMBRUSTER SIMON;HOECHST ARNIM;ROBERT BOSCH GMBH |
发明人 |
KRAFT KARL-HEINZ;ARMBRUSTER SIMON;HOECHST ARNIM |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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