| 摘要 |
PURPOSE: A deposition material supply device and a deposition system using the same are provided to prevent the denaturation of a lower deposition material in a container by heating an upper deposition material in the container only to minimize the heating of the lower deposition material. CONSTITUTION: A deposition material supply device(20) comprises a container(21), a heating unit(31), and a heat insulation unit(41). The container stores a deposition material. The heating unit heats the upper part of the deposition material stored in the container. The heat insulation unit, having a mesh structure, is located in the middle of the deposition material to insulate heat from the heating unit.
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