ELECTRON BEAM IRRADIATION DEVICE, ELECTRON BEAM IRRADIATION PROCESSING APPARATUS USING THE SAME, AND COLLECTOR ELECTRODE FOR USE IN THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electron beam irradiation device and an electron beam irradiation processing apparatus provided with a collector electrode, which stably operate without adding special mechanisms.

SOLUTION: The electron beam irradiation device is configured such that: it includes a cylindrical collector electrode made of a conductor and a high-frequency induction coil wound around the collector electrode; the collector electrode has an opening in a side surface thereof; and the opening is disposed corresponding to a high voltage-side end of the high-frequency induction coil.

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