发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THREOF |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to prevent a metal gate from deteriorating by forming an intermediate layer between the metal gates. CONSTITUTION: An NMOS(N-Channel Metal Oxide Semiconductor) transistor(Tr1) is formed on an NMOS transistor region(101). A PMOS(P-Channel Metal Oxide Semiconductor) transistor(Tr2) is formed on a PMOS transistor region(102). The NMOS transistor includes an NMOS gate(G1) and a first gate insulating layer(23A). A spacer(28A) is arranged on a sidewall of the NMOS gate. The PMOS transistor includes a PMOS gate(G2) and a second gate insulating layer(23B). A spacer(28B) is arranged on the sidewall of the PMOS gate.
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申请公布号 |
KR20120070801(A) |
申请公布日期 |
2012.07.02 |
申请号 |
KR20100132264 |
申请日期 |
2010.12.22 |
申请人 |
SK HYNIX INC. |
发明人 |
PARK, WOO YOUNG;LEE, KEE JEUNG;JI, YUN HYUCK;KIM, TAE YOON |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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