发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THREOF
摘要 PURPOSE: A semiconductor device and a manufacturing method thereof are provided to prevent a metal gate from deteriorating by forming an intermediate layer between the metal gates. CONSTITUTION: An NMOS(N-Channel Metal Oxide Semiconductor) transistor(Tr1) is formed on an NMOS transistor region(101). A PMOS(P-Channel Metal Oxide Semiconductor) transistor(Tr2) is formed on a PMOS transistor region(102). The NMOS transistor includes an NMOS gate(G1) and a first gate insulating layer(23A). A spacer(28A) is arranged on a sidewall of the NMOS gate. The PMOS transistor includes a PMOS gate(G2) and a second gate insulating layer(23B). A spacer(28B) is arranged on the sidewall of the PMOS gate.
申请公布号 KR20120070801(A) 申请公布日期 2012.07.02
申请号 KR20100132264 申请日期 2010.12.22
申请人 SK HYNIX INC. 发明人 PARK, WOO YOUNG;LEE, KEE JEUNG;JI, YUN HYUCK;KIM, TAE YOON
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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