发明名称 |
RECEIVING DEVICE FOR RECEIVING SEMICONDUCTOR SUBSTRATES |
摘要 |
A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material. |
申请公布号 |
US2012146273(A1) |
申请公布日期 |
2012.06.14 |
申请号 |
US201013138902 |
申请日期 |
2010.03.31 |
申请人 |
TIEFENBOECK HERBERT;BURGGRAF JUERGEN;PARGFRIEDER STEFAN;BURGSTALLER DANIEL |
发明人 |
TIEFENBOECK HERBERT;BURGGRAF JUERGEN;PARGFRIEDER STEFAN;BURGSTALLER DANIEL |
分类号 |
H01L21/683;B25B11/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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