| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment method and an alignment device of reducing damage to a substrate and a mask by reducing alignment operation times of the substrate and the mask. <P>SOLUTION: The method includes: holding a substrate 11 on substrate holding means 13; then, detecting an amplitude of vibration of the substrate 11 in the gravity direction; predicting a statically determinate position of the substrate 11 based on information of the amplitude; and aligning the substrate 11 and a mask 12 based on a position of an alignment mark at the statically determinate position. <P>COPYRIGHT: (C)2012,JPO&INPIT |
