| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microelectromechanical resonator structure having improved packaging stress characteristics, reduced energy loss into a substrate, and improved or optimal stability of the center of gravity during oscillation. <P>SOLUTION: Each elongated beam section 102 is connected to another elongated beam section at an end via a curved section 104, thereby forming a geometric shape having at least two elongated beam sections that are interconnected via curved sections (a rounded triangle shape, square or rectangle shape). The structure includes one or more nodal points or areas in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator structure to the substrate. In operation, the resonator structure oscillates in a combined elongating (or breathing) mode and bending mode; that is, the beam sections (which oscillate at the same frequency) exhibit an elongating-like (or breathing-like) motion and a bending-like motion. <P>COPYRIGHT: (C)2012,JPO&INPIT |
