| 摘要 |
PURPOSE: A pre-treating apparatus for harmful gas is provided to collect SiO_2 powder, the by-products of SiH_4 gas, through gaps between catalysts formed by the rotation of a catalyst layer during the pre-treating process of the SiH_4 gas. CONSTITUTION: A pre-treating apparatus for harmful gas includes a hollow pre-treating chamber(110), a rotary member(140), a driving member(150), and a catalyst layer(200). The rotary member is rotatably installed in the pre-treating chamber. The rotary member is composed of a disk shaped supporting plate(143) and a rotary shaft(141). The supporting plate includes a plurality of through holes. The rotary shaft rotates with the supporting plate. The drying member drives the rotary shaft. The catalyst layer is stacked on the upper side of the supporting plate in the pre-treating chamber and is composed of a plurality of catalytic members(210). The catalytic members increase the efficiency of reaction to generate SiO_2 powder based on SiH_4 gas.
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