| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope which is capable of reducing a data capacity required to generate an observation image. <P>SOLUTION: The scanning electron microscope according to the present invention scans a sample along one or more straight lines and adds, to a detection signal for each scan line, information for identifying a start position and an end position of the scan line as address information indicating a scan position on the sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
