HUMIDITY DETECTION SENSOR AND PROCESS FOR PRODUCTION THEREOF

摘要

The purpose is to enable the smooth penetration of water molecules into the inside of a humidity-sensitive film and to improve the moisture resistance of an upper electrode in a humidity detection sensor which comprises the humidity-sensitive film intercalated between a lower electrode and the upper electrode. The humidity detection sensor comprises a substrate (10), a lower electrode (21) which is arranged on the substrate (10), an upper electrode (23) which is arranged opposite to the lower electrode (21), a humidity-sensitive film (22) which is formed at least between the lower electrode (21) and the upper electrode (23) and of which the dielectric constant alters in accordance with humidity, and a protective film (24) which is so arranged as to cover the upper electrode (23), wherein the upper electrode (23) and the protective film (24) have an opening (25) in which a portion of the humidity-sensitive film (22) is exposed to the outside, and the humidity-sensitive film (22) is arranged at a position which is higher than at least the lower surface of the protective film (24) in the opening (25).