ION MILLING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ion milling device and method capable of directly cooling a surface of a sample irradiated with an ion beam at the time of milling by irradiating the sample with the ion beam.

SOLUTION: An ion milling device comprises; a sampling stage 1 where a sample S is placed; an ion source 2 for generating an ion beam with which the sample S is irradiated; a sample chamber 3 maintaining a storage space of the sampling stage 1 as a predetermined vacuum; and refrigerant supplying means 5 for supplying a gaseous refrigerant to cool the sample S inside the sample chamber 3. A surface of the sample irradiated with the ion beam can be directly cooled by the gaseous refrigerant by supplying the gaseous refrigerant inside the sample chamber.

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