CONVEYANCE DEVICE USED FOR SURFACE TREATMENT

摘要

[Problem] To ensure uniformity of the surface treatment and to reliably convey a substrate to be treated in a conveyance device used for surface treatment. [Solution] A plurality of shafts (30) are arranged at an interval in the conveyance direction (x) within the treatment region (R) of a conveyance device (20) used for surface treatment. Rotary support bodies (40) are disposed on each of the shafts (30). The rotary support bodies (40) are disposed in a dispersed manner in the conveyance direction (x) and width direction (y) such that the number (N40) of rotary support bodies (40) arranged in the treatment region (R) on a given line segment (L) along the conveyance direction (x) is constant in almost all the positions in the width direction (y). A substrate (9) to be processed is supported on the rotary support bodies (40) and the rotary support bodies (40) rotate about the axis of the shafts (30).