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发明名称
NON-DESTRUCTIVE SIGNAL PROPAGATION SYSTEM AND METHOD TO DETERMINE SUBSTRATE INTEGRITY
摘要
申请公布号
KR20120027221(A)
申请公布日期
2012.03.21
申请号
KR20117026424
申请日期
2010.04.28
申请人
LAM RESEARCH CORPORATION
发明人
VALCORE JOHN
分类号
H01L21/66;G01N29/12
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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