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发明名称
Method for manufacturing semiconductor chip with two sided sawing process of semiconductor wafer and an apparatus for manufacturing semiconductor chip by the method
摘要
申请公布号
KR101116301(B1)
申请公布日期
2012.03.20
申请号
KR20090067023
申请日期
2009.07.22
申请人
发明人
分类号
H01L21/78;H01L21/302
主分类号
H01L21/78
代理机构
代理人
主权项
地址
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