| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent deterioration of properties due to increase of the temperature of a substrate for solar cells in vacuum preheating in manufacturing solar cells. <P>SOLUTION: A manufacturing method of a solar cell includes the steps of: accommodating a substrate W for solar cells and a tray T in a vacuum preheating chamber 10 to reduce the pressure in the chamber; after bringing a pressure in the chamber to a vacuum atmosphere once, bringing it to a pressure higher than the vacuum atmosphere and lower than ambient pressure; and initiating heating with a lamp heater 15 under this atmosphere. Since the pressure in the chamber is high, a heat quantity radiated in the chamber due to heat conduction from the substrate W for solar cells increases. Therefore, as shown in Fig. 2, temperature increase of the substrate W for solar cells can be suppressed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
