发明名称 |
ACTUATOR, AND METHOD FOR DRIVING ACTUATOR |
摘要 |
A method for driving an actuator, wherein the actuator is provided with a first electrode, a piezoelectric body layer configured from (Bi, Na, Ba)TiO3, and a second electrode, the piezoelectric body layer is sandwiched between the first electrode and the second electrode, the +X direction, the +Y direction, and the +Z direction are the [100] direction, the [01-1] direction, and the [011] direction, respectively, the piezoelectric body layer is preferentially oriented in the +Z direction, and a potential difference is applied between the first electrode and the second electrode to thereby drive the actuator. Consequently, unnecessary deformation when the actuator is driven is suppressed. |
申请公布号 |
WO2012026055(A1) |
申请公布日期 |
2012.03.01 |
申请号 |
WO2011JP03400 |
申请日期 |
2011.06.15 |
申请人 |
PANASONIC CORPORATION;UEDA, MICHIHITO;HARIGAI, TAKAKIYO;TANAKA, YOSHIAKI;ADACHI, HIDEAKI;FUJII, EIJI |
发明人 |
UEDA, MICHIHITO;HARIGAI, TAKAKIYO;TANAKA, YOSHIAKI;ADACHI, HIDEAKI;FUJII, EIJI |
分类号 |
B81B3/00;B41J2/16;C23C14/08;H01L41/09;H01L41/18;H01L41/22;H01L41/313;H01L41/39;H02N2/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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