发明名称 ACTUATOR, AND METHOD FOR DRIVING ACTUATOR
摘要 A method for driving an actuator, wherein the actuator is provided with a first electrode, a piezoelectric body layer configured from (Bi, Na, Ba)TiO3, and a second electrode, the piezoelectric body layer is sandwiched between the first electrode and the second electrode, the +X direction, the +Y direction, and the +Z direction are the [100] direction, the [01-1] direction, and the [011] direction, respectively, the piezoelectric body layer is preferentially oriented in the +Z direction, and a potential difference is applied between the first electrode and the second electrode to thereby drive the actuator. Consequently, unnecessary deformation when the actuator is driven is suppressed.
申请公布号 WO2012026055(A1) 申请公布日期 2012.03.01
申请号 WO2011JP03400 申请日期 2011.06.15
申请人 PANASONIC CORPORATION;UEDA, MICHIHITO;HARIGAI, TAKAKIYO;TANAKA, YOSHIAKI;ADACHI, HIDEAKI;FUJII, EIJI 发明人 UEDA, MICHIHITO;HARIGAI, TAKAKIYO;TANAKA, YOSHIAKI;ADACHI, HIDEAKI;FUJII, EIJI
分类号 B81B3/00;B41J2/16;C23C14/08;H01L41/09;H01L41/18;H01L41/22;H01L41/313;H01L41/39;H02N2/00 主分类号 B81B3/00
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