ROLLER TYPE NANO-IMPRINT DEVICE, MOLD ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, FIXED ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, AND NANO-IMPRINT SHEET MANUFACTURING METHOD

摘要

The present invention provides a roller nanoimprint apparatus capable of preventing a workpiece film with nanostructures having been transferred from the mold roller from being uneven in thickness and allowing easy replacement of the mold roller. The present invention is a roller nanoimprint apparatus including a mold roller and continuously transferring nanosizedprotrusions to a surface of a workpiece film by rotating the mold roller,
wherein the mold roller is a cylindrical body having an outer circumference surface with nanosized recesses formed thereon,
the roller nanoimprint apparatus further includes a fluid container having an elastic film inflatable by injecting fluid into the container, the fluid container being arranged in a region defined by an inner circumference surface of the mold roller,
the mold roller is mounted or demounted when the elastic film is shrunken, and
the mold roller is supported from the inside when the elastic film is inflated.