| 摘要 |
PURPOSE: An apparatus for polishing high-hardness conductive materials and a method thereof are provided to polish the surface of high-hardness conductive materials at high precision, since the surface of the materials are oxidized and emulsified by electrochemical oxidation. CONSTITUTION: An apparatus for polishing high-hardness conductive materials comprises a magnetic member, functional fluid, an electrolyte(116), a drive unit, a transfer unit, and a power applying unit. The fluid is attached to the outer surface of the magnetic member. The fluid comprises magnetic particles and an abrasive(113). The electrolyte is mixed with the functional fluid. The drive unit drives the magnetic member. The transfer unit transfers high-hardness conductive materials(120). The power applying unit applies power between the functional fluid mixed with the electrolyte and the hardness conductive material. |
