发明名称 Mounting device
摘要 A mounting device includes a vertically movable mounting table for mounting thereon a target object and a rotational driving mechanism for rotating the mounting table within a predetermined angle. The mounting table is vertically raised and rotated by the rotational driving mechanism. The rotational driving mechanism includes a driving shaft extending in a tangential direction of the mounting table and a moving body moving in the tangential direction via the driving shaft. A first cam follower is attached in perpendicular to the moving body and a second cam follower is extending horizontally from an outer circumferential surface of the mounting table so as to be in contact with the first cam follower. Also, a resilient member connecting the mounting table and the moving body brings the first cam follower and the second cam follower into elastic contact with each other.
申请公布号 US8113084(B2) 申请公布日期 2012.02.14
申请号 US20080020655 申请日期 2008.01.28
申请人 YANO KAZUYA;SHIMOYAMA HIROSHI;SUZUKI MASARU;TOKYO ELECTRON LIMITED 发明人 YANO KAZUYA;SHIMOYAMA HIROSHI;SUZUKI MASARU
分类号 G01R31/00 主分类号 G01R31/00
代理机构 代理人
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