| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical scale for achieving highly accurate measurement. <P>SOLUTION: This optical scale is provided with: a base substrate 3; a diffraction grating film 5 having a diffraction grating 4 formed on the base substrate 3; and a protection film 7 formed on the diffraction grating film 5, and flattened by removing the irregularity of a surface 7a formed in association with the irregularity of the diffraction grating 4. The protection film is formed according to the undulation of the diffraction grating film so that the film thickness can be made uniform. <P>COPYRIGHT: (C)2012,JPO&INPIT |
