| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measurement device capable of appropriately correcting an Abbe error. <P>SOLUTION: A three-dimensional measuring machine includes: a probe having a gauge head; a moving mechanism for moving the probe; and a host computer 5 for controlling the moving mechanism. The host computer 5 includes: a correction amount calculation part 532 for calculating a correction amount for correcting the error of the position of the gauge head generated by the movement of the probe; and a correction part 533 for correcting the error of the position of the gauge head on the basis of the correction amount calculated in the correction amount calculation part 532. The correction amount calculation part 532 calculates a translation correction amount for correcting the translation error of the probe and a rotation correction amount for correcting the rotation error of the probe on the basis of the rotation frequency of the movement of the probe. <P>COPYRIGHT: (C)2012,JPO&INPIT |
