发明名称 PACKAGE MANUFACTURING METHOD, PACKAGE, PIEZOELECTRIC VIBRATOR, AND OSCILLATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a package manufacturing method, a package, a piezoelectric vibrator, and an oscillator capable of improving the location accuracy of a through electrode. <P>SOLUTION: A package manufacturing method includes a welding step of welding a wafer 40 for a base substrate to a rivet 30 while pressing and heating the wafer 40 for the base substrate from both sides of a thickness direction with a mold 60, forms a rivet storage part 67 that can store a tip of a core material part 28 in a receiving mold 63 of the mold 60, and forms an inner face of the rivet storage part 67 in a tapered shape that extends from a bottom side to an opening side. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012023610(A) 申请公布日期 2012.02.02
申请号 JP20100160642 申请日期 2010.07.15
申请人 SEIKO INSTRUMENTS INC 发明人 TAYA YOSHIHISA
分类号 H03H3/02;H01L23/08;H01L23/12;H03B5/32;H03H9/02 主分类号 H03H3/02
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