| 摘要 |
A laser processing apparatus which performs a predetermined processing by irradiating a laser beam (2) emitted from a laser oscillator onto a surface of a workpiece (1) through a condenser lens (3). There are provided microdeformation lenses (4), (5) for changing the beam shape in the vertical direction and the horizontal direction in a laser beam (2), for example, and a lens deformation control device for controlling the amount of deformation of the microdeformation lenses (4), (5) which are to adjust the beam shape of the laser beam (2) to a predetermined shape. The microdeformation lenses (4), (5) have a structure such that they can be caused to change to a desired shape by means of a plurality of actuators (4b), (5b) disposed around the outer periphery of the lenses. High-precision processing can be achieved, while maintaining the desired beam shape, even if the shape of the workpiece changes, since the laser beam shape can be rapidly changed to the desired shape, on a smooth curved surface equivalent to that of an ordinary lens. |
