| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a detection error in a height inspection. <P>SOLUTION: A detection device 100 includes: at least an illumination optical system 200 which has a light source 201 and illuminates the surface of an object 101 with light emitted from the light source; an objective lens 218 for illuminating the object 101 with illumination light from the illumination optical system 200, and condensing reflected light; an imaging optical system for imaging the reflected light passed through the objective lens 218; illumination slits 210 provided at points conjugate to the object 101 in the illumination optical system 200; a beam splitter 222 in the imaging optical system; a front detection slit 230 provided ahead of one imaging point out of the two divided light; a rear detection slit 240 provided behind the other imaging point; a plurality of front detection light quantity sensors 252 for receiving independently each of transmitted light passed through the front detection slit; and a plurality of rear detection light quantity sensors 254 for receiving independently each of transmitted light passed through the rear detection slit. <P>COPYRIGHT: (C)2012,JPO&INPIT |
