发明名称 Plasma Dicing and Semiconductor Devices Formed Thereof
摘要 In one embodiment, a method of forming a semiconductor device includes forming islands by forming deep trenches within scribe lines of a substrate. The islands have a first notch disposed on sidewalls of the islands. A first electrode stack is formed over a top surface of the islands. The back surface of the substrate is thinned to separate the islands. A second electrode stack is formed over a back surface of the islands.
申请公布号 US2011309479(A1) 申请公布日期 2011.12.22
申请号 US20100820715 申请日期 2010.06.22
申请人 ENGELHARDT MANFRED 发明人 ENGELHARDT MANFRED
分类号 H01L29/868;H01L21/329;H01L23/544 主分类号 H01L29/868
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