发明名称 |
Rendering a mask using coarse mask representation |
摘要 |
A method, system and computer program product for rendering a mask are disclosed. A method of rendering a mask may comprise: providing an initial mask design for a photolithographic process, the initial mask design including polygons; initially rendering the initial mask design as a coarse mask representation in a pixel based image calculation; identifying an overhang portion; and rendering the overhang portion using a set of subpixels whose artifacts from spatial-localization lie outside a practical resolution of a pseudo lens having a numerical aperture larger than that of a projection lens used in the photolithographic process; and updating the initial rendering based on the overhang portion rendering. |
申请公布号 |
US8073288(B2) |
申请公布日期 |
2011.12.06 |
申请号 |
US20080015084 |
申请日期 |
2008.01.16 |
申请人 |
LAVIN MARK A.;MUKHERJEE MAHARAJ;ROSENBLUTH ALAN E.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LAVIN MARK A.;MUKHERJEE MAHARAJ;ROSENBLUTH ALAN E. |
分类号 |
G06K9/20 |
主分类号 |
G06K9/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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