| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat treatment furnace capable of suppressing the oxidation and coloring of a workpiece. <P>SOLUTION: The vacuum heat treatment furnace 1, having a carry-in chamber 10 into which the workpiece W is carried, and a heat treatment chamber 20 for heat-treating the workpiece W transported from the carry-in chamber 10, employs a configuration of having: a vaporizer 50 for evaporating moisture in the carry-in chamber 10; and an exhaust device 60 for exhausting the evaporated moisture outside the carry-in chamber 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
