发明名称 |
Method of producing coated member |
摘要 |
<p>A production method of a coated member (20) is performed in the following way. First, a diamond-like carbon film deposition process in which the diamond-like carbon film (21) is formed on a surface of the base material (4) by generating plasma by applying voltage to the base material (4) in a processing chamber (3) that stores the base material (4), while evacuating the processing chamber (3) and introducing feedstock gas that contains at least a carbon compound into the processing chamber (3). After this, a hydrogenation process in which the deposited diamond-like carbon film (21) is hydrogenated using hydrogen gas by stopping the voltage application and introducing hydrogen gas inducted instead of the feedstock gas, while the evacuation is being continued.</p> |
申请公布号 |
EP2390381(A2) |
申请公布日期 |
2011.11.30 |
申请号 |
EP20110168034 |
申请日期 |
2011.05.30 |
申请人 |
JTEKT CORPORATION |
发明人 |
SUZUKI, MASAHIRO;SAITO, TOSHIYUKI;YAMAKAWA, KAZUYOSHI |
分类号 |
C23C16/26;C23C16/503;C23C16/515;C23C16/56 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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